01309cam a2200385 c 4500001001300000005001500013007000300028008004100031020003800072020003800110049006500148052002200213056001300235082001800248245024500266250001200511260003700523300003600560500006900596504002400665650004000689700001900729700001400748700001400762700001400776700001400790700001400804700001400818700001400832700001400846700001400860700001400874700001100888950002400899KMO20235859420240416142754ta230920s2023    ulkad         000   kor    a9791166754586 (1)g93560:c\25000  a9791166753794 (2)g93560:c\200000 lEM8763267v1lEM8763268v1c2lEM8624557v2lEM8624558v2c201a569.4b23-39c1-2  a569.42601a621.3815222320a(NCS 기반) 반도체 전공정장비 =xSemiconductor frontend processing equipment.n1-2 /d이인호,e이현배,e김진석,e김용태,e황성진,e원영진,e성홍석,e김덕영,e김상용,e오찬권,e성홍석,e김현 공저  a제2판  a서울 :b복두출판사,c2023  a2책 :b삽화, 도표 ;c26 cm  a권별감수: 1. 임준우, 송화수 -- 2. 김남훈, 김태환  a참고문헌 수록 8a반도체[半導體]0KSH19980005811 a이인호4aut1 a이현배1 a김진석1 a김용태1 a황성진1 a원영진1 a성홍석1 a김덕영1 a김상용1 a오찬권1 a성홍석1 e김현0 b\45000c(합산가)