00877nam a2200229 a 4500001001300000005001500013007000300028008004100031041001300072049001700085052002100102056001300123082001800136100004800154245016200202260004100364300003900405502011600444504003000560546003500590900002200625KDM20086154420200916171242ta081106s2008    ulkad    m AK 000   eng  0 aengbkor0 lWM564936fDP02a621.38152bH233r  a569.42401a621.381522211 a한경훈,g韓暻薰,d1974-0KAC20162325310aReal-time end-point and fault detection of plasma etching processes =x플라즈마 식각 공정에 대한 실시간 종말점 및 이상진단 /d한경훈  aSeoul :bSeoul National Univ.,c2008  ax, 128 p. :bill., charts ;c26 cm1 aThesis(Ph.D.) --bGraduate School of Seoul National Univ.,cSchool of Chemical & Biological Engineering,d2008.  aBibliography: p. 116-122.  aIn English; summary in Korean.10aHan, Kyoung-hoon.