00997nam a2200217 k 4500001001500000005001500015008004100030040001900071041001300090049003200103052002200135056001400157082001600171100004800187245024100235260004200476300003600518502007600554653012900630963002000759KDM199841066  20200909105220990311s1997    tjkaf      CB 000   kor    a011001c0110010 akorbeng0 lEM1767967lEM1767968c2fDP01a530.48b이611ㅁ  a530.48240 a620.1982211 a이정노,g李正魯,d1968-0KAC20186044210a마이크로웨이브에의한 비정질 실리콘의 저온 고상결정화 거동에 관한 연구=x(A)study on the low-temperature solid phase crystallization behavior of amorphous silicon thin films by microwave heating/d이정노  a대전:b한국과학기술원,c1997  ax,138장:b삽도,도판;c26cm1 a학위논문(박사) --b한국과학기술원:c재료공학과,d1997  a마이크로웨이브a실리콘a고상결정화aTEMPERATUREaSOLIDaPHASEaCRYSTALLIZATIONaAMORPHOUSaSILICONaMICROWAVE  a재료공학과