01016nam a2200217 k 4500001001500000005001500015008004100030040001900071041001300090049003200103052002200135056001400157082001900171100003600190245022000226260004200446300003600488502007300524653018400597963001700781KDM199834864  20200723163505990106s1998    tjkaf      CB 000   kor    a011001c0110010 akorbeng0 lEM1766779lEM1766780c2fDP01a569.43b조647ㄹ  a569.43240 a621.3815282211 a조덕호,d1962-0KAC20184572510a라디오파 집적회로를 위한 감압 화학기상 증착 장비를 이용한 규소게르마늄 이종접합 쌍극자트랜지스터=xReduced-pressure CVD-grown SiGe base HBTs for RF applicationS/d조덕호  a대전:b한국과학기술원,c1998  aiv,82장:b삽도,도판;c26cm1 a학위논문(박사) --b한국과학기술원:c물리학과,d1998  a라디오파a집적회로a감압a화학기상a장비a규소게르마늄a이종접합a쌍극자트랜지스터aREDUCEDPRESSUREaCVDGROWNaSIGEaBASEaHBTSaRFaAPPLICATIONS  a물리학과