00915nam a2200217 c 4500001001300000005001500013008004100028041001300069049003200082052001700114056001500131082001600146245021400162260003600376300004000412502009900452504002900551650005300580700004500633900001900678KDM20075715320210928173904071123s2007    tjkad      MB 000   kor  0 akorbeng0 lEM4052872lEM4052873c2fDP01a530.495b7-3  a530.495240 a620.19522100a임베디드 캐패시터 적용을 위한 bismuth 계 유전박막의 제조 및 특성평가=xPreparation and properties of bismuth based dielectric thin films for embedded capacitor application/d安慶燦  a대전:b忠南大學校,c2007  aix, 170 p.:b삽화, 도표;c26 cm1 a학위논문(박사) --b忠南大學校 大學院,c材料工學科 材料工學專攻,d2007  a참고문헌: p. 161-165 8a유전체 박막[誘電體薄膜]0KSH20000317711 a안경찬,g安慶燦0KAC2021B02884aut10aAn, Gyeongchan