00990nam a2200217 c 4500001001300000005001500013008004100028041001300069049003200082052001600114056001400130082001400144245024200158260003900400300003600439502011100475504002900586650005200615650005200667700005300719KDM20070769220070306163712070227s2007    ulkad      AL 000   kor  0 akorbeng0 lEM3817751lEM3817752c2fDP01a530.48b7-1  a530.48240 a620.122100a평판형 디스플레이를 위한 새로운 형태의 내장형 線型 誘導結合 플라즈마 소스에 關한 硏究=xStudy of novel internal linear inductively coupled plasma source for flat panel display applications/d金炅男  a서울:b成均館大學校,c2007  a192 p.:b삽화, 도표;c26 cm1 a학위논문(박사) --b成均館大學校 大學院,c新素材工學科 電子材料工學專攻,d2007  a참고문헌: p. 181-186 8a디스플레이(화면)[display]0KSH1998043546 8a평면 디스플레이[平面--]0KSH20050151591 a김경남,g金炅男,d1978-0KAC2018487044aut