00877nam a2200241 c 4500001001300000005001500013008004100028020003100069049002800100052001600128056002000144082002300164245005900187260005500246300003500301440010100336504002500437650003400462650004000496650004800536710004000584950001100624KMO20064592620190917143852061031s2006    ulkad         000   kor    a8984322652g93550:c\600000 lEM3741491lEM3741492c201a502.9b6-53  a502.9a569.4240 a608a621.3815222100a차세대 노광장치/d편저: 한국특허정보원  a서울:b산업교육연구소:bJinhan M&B,c2006  a84장:b삽화, 도표;c30 cm00a기술 및 시장, 특허분석보고서=xTechnology and market trends & patent analysis report  a참고문헌: 장 84 8a특허[特許]0KSH1998011717 8a반도체[半導體]0KSH1998000581 8a리소그래피[lithography]0KSH2002040744  a한국특허정보원0KAB2015004560 b\60000