01142nam a2200253 c 4500001001500000005001500015008004100030040001900071041001300090049001700103052002200120056001400142082001500156100004800171245018200219260004200401300003600443502007600479653019800555740007400753950002100827963002000848965002000868KDM199107778  19941011214938910816s1990    ulkaf      CB 000   kor    a011001c0110010 akorbeng0 lEM832497fDP01a530.43b최722ㅇ  a530.43230 a620.182191 a최병호,g崔炳浩,d1952-0KAC20184686700aRF sputter 방법으로 제조한 ZnO:Ga 박막의 전기 및 광학적 특성=xElectrical and optical properties of RF sputtered and Ga-doped zinc oxide thin films/d최병호  a서울:b한국과학기술원,c1990  avi,99장:b삽도,도판;c26cm1 a학위논문(박사) --b한국과학기술원:c재료공학과,d1990  aRFaSPUTTERa방법a제조한aZNOGAa박막a전기a광학적a특성aELECTRICALaOPTICALaPROPERTIESaSPUTTEREDaGADOPEDaZINCaOXIDEaTHINaFILMSa알에프a스퍼터a제드엔오지에0 a알에프 스퍼터 방법으로 제조한 제드엔오:지에이 ...1 a비매품b\5400  a재료공학과  a반도체박막