01123cam a22003131i 4500001001300000005001500013007000300028008004100031040003200072041001300104049001800117052001800135056001100153082001400164100003600178245016200214264003800376300004500414336002600459337002900485338002700514500002600541502011800567504003200685546003400717900002600751900001400777900001800791KDM20197634120200806144312ta190104s2019    ulka     m AQ 000c  eng    a211046c011012d011001erda0 aengbkor0 lWM961117fWDP02a621.3b19-569  a5602601a621.32231 a윤재홍,d1984-0KAC20187423210aAtomic layer deposition of metals on non-oxide surfaces =xNon-oxide 물질 위에 증착한 금속 원자층 증착 공정의 특성 연구 /dYoon, Jaehong 1aSeoul :bYonsei University,c2019  axi, 109 leaves :billustrations ;c26 cm  atextbtxt2rdacontent  aunmediatedbnc2rdamedia  avolumebnc2rdacarrier  aAdviser: Hyungjun Kim1 aThesis(Ph.D.) --bGraduate School, Yonsei University,cDepartment of Electrical and Electronic Engineering,d2019  aBibliography: leaves 94-103  aIn English; summary in Korean10aYoon, Jaehong,d1984-10a김형준10aKim, Hyungjun