01176cam a22003131i 4500001001300000005001500013007000300028008004100031040003200072041001300104049001800117052001600135056001100151082001200162100004800174245012900222264004400351300004000395336002600435337002900461338002700490500002700517502009400544504002800638546003400666856012400700900001900824900001900843KDM20198765420200727161537ta190103s2019    ulka     m AL 000c  eng    a241026c011012d011001erda0 aengbkor0 lWM957931fWDP02a530b19-240  a4202601a5302231 a권성률,g權成律,d1987-0KAC20185738910aLow dielectric constant SiCOH films deposited with PECVD and their application to semiconductor and biochip /dSungyool Kwon 1aSeoul :bSungkyunkwan University,c2019  a108 pages :billustrations ;c30 cm  atextbtxt2rdacontent  aunmediatedbnc2rdamedia  avolumebnc2rdacarrier  aAdviser: Donggeun Jung1 aThesis(Ph.D.) --bGraduate School, Sungkyunkwan University,cDepartment of Physics,d2019  aIncludes bibliographies  aIn English; summary in Korean40uhttp://www.riss.kr/link?id=T15072894nKERISz이 자료의 원문은 한국교육학술정보원에서 제공합니다.10aKwon, Sungyool10aJung, Donggeun