01932nam a2200505 c 4500001001300000005001500013007000300028008004100031020003400072041001300106049002800119052001700147056001300164082001800177240007800195245011800273246009400391260004200485300006100527500006200588504003300650546004100683650004000724700005600764700004600820700004600866700004400912880003300956880003900989880002901028880003001057880003101087880002701118900002901145900002501174900004001199900002401239900003201263900001901295900003201314900002401346900002101370940002401391950001101415KMO20185705320240618133820ta181116s2018    ulkad         001   kor    a9791156107002g93560:c\320001 akorheng0 lEM7145571lEM7145572c201a569.4b18-15  a569.42601a621.3815222300aThree-dimensional integration of semiconductors.l한국어0KAT202425729006880-01a3차원 반도체 /d콘도 가즈오,e카다 모리히로,e다카하시 켄지 편저 ;e장인배 역19aThree-dimensional integration of semiconductors:bprocessing, materials, and applications  6880-02a서울 :b씨아이알,c2018  axvii, 503 p. :b삽화(일부천연색), 도표 ;c26 cm  a원저자명: Kazuo Kondo, Morihiro Kada, Kenji Takahashi  a참고문헌과 색인수록  a영어 원작을 한국어로 번역 8a반도체[半導體]0KSH19980005811 6880-03a곤도 가즈오,d1952-0KAC2018P03234aut1 6880-04a가다 모리히로0KAC2018P03281 6880-05a다카하시 겐지0KAC2018P03421 6880-06a장인배,d1964-0KAC201519419006245-01/(Ba3 chawon bandoche  6260-02/(BaSeoul :bSsiaial,c20181 6700-03/(BaGondo, Gajeuo1 6700-04/(BaGada, Morihiro1 6700-05/(BaDakahasi, Genji1 6700-06/(BaJang, Inbae10a콘도 가즈오,d1952-10aKondo, Kazuo,d1952-10a근등화부,g近藤和夫,d1952-10a카다 모리히로10a가전수굉,g嘉田守宏10aKada, Morihiro10a고교건사,g高橋健司10a다카하시 켄지10aTakahashi, Kenji0 a삼차원 반도체0 b\32000