01382cam a22003491i 4500001001300000005001500013007000300028008004100031040003200072041001300104049001800117052001800135056001100153082001400164100004800178245010000226264003800326300004500364336002600409337002900435338002700464500002600491502010300517504003200620546003400652653014100686856012400827900002400951900002500975900001401000900001801014KDM20185692920211109104552ta160708s2016    ulka     m AQ 000   eng    a211046c011012d011001erda0 aengbkor0 lWM898582fWDP02a621.8b18-338  a5502601a621.82231 a정호원,g鄭晧元,d1983-0KAC2021O006210aThree-dimensional nano-patterning using contact probe based plasmonic lithography /dHowon Jung 1aSeoul :bYonsei University,c2016  ax, 100 leaves :billustarations ;c26 cm  atextbtxt2rdacontent  aunmediatedbnc2rdamedia  avolumebnc2rdacarrier  aAdviser: Jae Won Hahn1 aThesis(Ph.D.) --bGraduate School, Yonsei University,cDepartment of Mechanical Engineering,d2016  aBibliography: leaves 86-100  aIn English; summary in Korean  anano-scale patterning aplasmonic lithography apattern transfer amultilayer structure athree-dimensional nano-patterning amicro lens40uhttp://www.riss.kr/link?id=T14186031nKERISz이 자료의 원문은 한국교육학술정보원에서 제공합니다.10aJung, Howon,d1983-10aJeong, Howon,d1983-10a한재원10aHahn, Jae Won