00996nam a2200217 k 4500001001300000005001500013008004100028041001300069049003000082052001800112056001300130082001500143100004800158245022700206260003200433300003500465502009400500504003400594653012600628900002400754KDM20053318620200908134126050729s2004    ulka       AQ 000   eng  0 aengbkor0 lWM441271lWM441272c2fDP02a621.81bS958d  a551.1240 a621.812211 a성인하,g成寅河,d1969-0KAC20172070610aDevelopment of mechano-chemical nanolithography technology based on nanotribological Interactions=x나노트라이볼로지적 상호작용에 기반한 기계-화학적 나노리소그래피 기술의 개발/dIn-ha Sung  aSeoul:bYonsei univ.,c2004  axiv, 178 leaves:bill.;c26 cm1 aThesis(Ph.D.) --bGraduate School, Yonsei Univ.:cDept. of Mechanical Engineering,d2004.  aBibliography: leaves 160-176.  a자기조립분자막a분자동역학a시뮬레이션a나노트라이볼로지a나노리소그래피a기계화학적10aSung, In-ha,d1969-