01243pam a2200337 c 4500001001300000005001500013007000300028008004100031020003500072023001800107049002800125052001600153056001300169082001800182245011200200246006400312250001900376260005200395300003800447490002200485500003900507504002500546650003500571650004000606710005000646830002200696880008900718880005300807880003300860950001200893KMO20180798220180412102950ta171011s2017    ulkad         000   kor    a9791161820286g13500:c\120000  aCIP20170262080 lEM6904607lEM6904608c201a569.4b18-1  a569.42601a621.38152223006880-01aFine pitch 배선 형성용 구리에찬트(Cu etchant) 조사보고서 /d비피기술거래 [편]30aFine pitch 배선 형성용 구리에찬트 조사보고서  a2018 개정판  6880-02a[서울] :b비피기술거래,c[2017]  a134장 :b삽화, 도표 ;c30 cm10aBP special report  a권말부록: 국내 특허 목록  a참고문헌: p. 133 8a에칭[etching]0KSH1998034673 8a반도체[半導體]0KSH1998000581  6880-03a비피기술거래0KAB2017060074aut 0aBP special report006245-01/(BaFine pitch baeseon hyeongseongyong Guri echanteu(Cu etchant) josa bogoseo  6260-02/(Ba[Seoul] :bBipi Gisul Georae,c[2017]  6710-03/(BaBipi Gisul Georae0 b\120000