00962nam a2200241 k 4500001001300000005001500013008004100028041001300069049003200082052001600114056001400130082001800144245017800162260003600340300003100376500003600407502009200443504002800535650005300563653002600616700005300642900002500695KDM20050319920200819152811050219s2005    ulka       AX 000   kor  0 akorbeng0 lEM3243777lEM3243778c2fDP01a569.41b5-1  a569.41240 a621.3815222100a다이나믹 열분포 제어에 의한 무결정 결함 CZ 성장에 관한 연구=x(A)study on CZ pure silicon crystal growth via control of dynamic heat flux/d李坤燮  a서울:b漢陽大學校,c2005  axi, 145장:b삽도;c26cm  a권말에 '발표 논문'수록1 a학위논문(박사) --b漢陽大學校 大學院:c電子通信電波工學科,d2005  a참고문헌: p.130-135 8a반도체 장치[半導體裝置]0KSH1998000915  a반도체디바이스1 a이곤섭,g李坤燮,d1964-0KAC2017004754aut10aLee, Gon-Sub,d1964-