01186nam a2200325 c 4500001001300000005001500013007000300028008004100031020002500072049002800097052001700125056001300142082001800155245010500173260007200278300003800350490003300388504002900421650004000450650003500490700002700525700002200552830003300574880005800607880008000665880002800745880002900773940004400802950001400846KMO20162995220170906130636ta160504s2015    tjkad         000   kor    a9788929407711g935600 lEM6400469lEM6400470c201a569.4b16-11  a569.42601a621.38152223006880-01aEtchant 기술동향 및 시장분석 :bCu etchant를 중심으로 /d임대현,e윤성민  6880-02a대전 :bKiSTi(한국과학기술정보연구원),c[2015]  a149 p. :b삽화, 도표 ;c26 cm10a(2015) 정보분석보고서  a참고문헌: p. 148-149 8a반도체[半導體]0KSH1998000581 8a에칭[etching]0KSH19980346731 6880-03a임대현4aut1 6880-04a윤성민 0a(2015) 정보분석보고서006245-01/(BaEtchant gisul donghyang mit sijang bunseok  6260-02/(BaDaejeon :bKiSTi(Hanguk Gwahak Gisul Jeongbo Yeonguwon),c[2015]1 6700-03/(BaIm, Daehyeon1 6700-04/(BaYun, Seongmin0 a에천트 기술동향 및 시장분석1 a비매품