00594nam a2200157 c 4500001001300000005001500013007000300028008004100031040001100072052003300083245007900116300002200195545004700217700005300264773011900317KSI00085192720110721103343ta110422s2000    ulk           000   kor    a01100101a576.05b한568ㅅc3(1)-3(3)00a열화학기상증착법 =xThermal chemical vapor deposition /d정동근  ap. 34-39 ;c30 cm  a정동근, 성균관대학교 물리학과1 a정동근,g鄭東根,d1965-0KAC2018053964aut0 t세라미스트.d한국요업학회.g3권 1호(2000년 2월), p. 34-39q3:1<34w(011001)KSE199801461,x1226-976X