01128nam a2200241 c 4500001001300000005001500013007000300028008004100031040001100072041001300083052003400096245017500130300002400305545008100329545006300410653012200473700005300595700003600648773014600684856002100830900001700851900001800868KSI00080795820100628104227ta100511s2007    ulk           000   kor    a0110010 akorbeng01a552.05b한438ㅎㅅc2007(1)00aFocal length를 이용한 전자 렌즈 제어를 위한 하드웨어 설계 =xHardware design for the electron optic control using focal length /d임선종,e이찬홍  ap. 420-424 ;c26 cm  a임선종, 한국기계연구원, 지능기계연구센터bsjlim@kimm.re.kr  a이찬홍, 한국기계연구원, 지능기계연구센터  a전자빔a전자 현미경a전자 렌즈aElectron beamaScanning electron microscopeaElectron opticaFocal length1 a임선종,g林善鍾,d1965-0KAC2017128794aut1 a이찬홍,d1956-0KAC2016236841 t(한국공작기계학회)학술대회 논문집.d韓國工作機械學會.g2007 春季(2007), p. 420-424q2007:1<420w(011001)KSE20020194340u77058368aKd00010aLim, Sunjong10aLee, Chanhong