01152nam a2200265 c 4500001001300000005001500013007000300028008004100031040001100072041001300083052003000096245020400126300002400330545006500354545006500419545006500484653007400549700001900623700001400642700004800656773013000704900001700834900001700851900001800868KSI00076238520091022100637ta090615s2000    ulk           000   kor    a0110010 akorbeng01a530.405b한596ㅎc10(7)00aNegative ion beam sputter 법으로 증착한 DLC 박막의 특성 =xProperties of diamond-like carbon(DLC) thin films deposited by negative ion beam sputter.n1 /d김대연,e강계원,e최병호  ap. 459-463 ;c30 cm  a김대연, 금오공과대학교 신소재시스템공학부  a강계원, 금오공과대학교 신소재시스템공학부  a최병호, 금오공과대학교 신소재시스템공학부  aIon beam methodsaAmorphous materialsaThin filmsa이온aDLC 박막1 a김대연4aut1 a강계원1 a최병호,g崔炳浩,d1952-0KAC2018468670 t한국재료학회지.d韓國材料學會.g10권 7호(2000년 7월), p. 459-463q10:7<459w(011001)KSE199509224,x1225-056210aKim, Taeyoun10aKang, Gyewon10aChoi, Byungho