01290nam a2200277 c 4500001001300000005001500013007000300028008004100031040001100072041001300083052002900096245029300125300002400418545006400442545006200506545007100568653010000639700002000739700004800759700001400807773012800821856002100949900001400970900001400984900001400998KSI00076177920091022100620ta090612s1998    ulk           000   eng    a0110010 aengbkor01a530.405b한596ㅎc8(1)00aVisible photoluminescence from hydrogenated amorphous silicon thin films deposited on silicon substrates by electron cyclotron resonance plasma enhanced chemical vapor deposition =xECR-PECVD로 증착한 a-Si : H/Si로 부터의 가시 photoluminescence /dC.M. Shim,eD. Jung,eJ.H. Lee  ap. 359-361 ;c30 cm  aC.M. Shim, Department of Physics, Sung Kyun Kwan University  aD. Jung, Department of Physics, Sung Kyun Kwan University  aJ.H. Lee, Department of Materials Engineering, Sun Moon University  a가시 photoluminescencea플라즈마화학증착장비aVisible photoluminescenceaPECVDaECR1 aShim, C.M.4aut1 a정동근,g鄭東根,d1965-0KAC2018053961 aLee, J.H.0 t한국재료학회지.d韓國材料學會.g8권 4호(1998년 4월), p. 359-361q8:4<359w(011001)KSE199509224,x1225-056240u75013260aKd00210a심천만10a정동근10a이주현