01055nam a2200289 c 4500001001300000005001500013007000300028008004100031041001300072049002100085052002000106056001400126082001800140245022000158260003900378300004100417500004900458500003100507504002400538546002500562650005300587700001400640710004800654710002600702910002000728950001700748KMO20135267120211208155946ta130826s1988    ggkad         000   korBU0 akorbeng0 lEM5729998v1fGP01a569.41b13-1c1  a569.412501a621.3815222100a반도체재료의 재료특성분석 기술개발에 관한 연구=x(A) study on the materials characterization of semiconductor materials: development of cross-sectional TEM technique.n1 /d과학기술처 [편]  a[과천] :b과학기술처,c1988  ax, 102 p. :b삽화, 도표 ;c26 cm  a주관연구기관명: 한국과학기술원  a연구책임자: 금동화  a참고문헌 수록  a영어 요약 있음 8a반도체 재료[半導體材料]0KSH20020364251 a금동화  a한국.b과학기술처0KAB2014001224aut  a한국과학기술원  a과학기술처1 a가격불명