00970nam a2200229 a 4500001001300000005001500013007000300028008004100031041001300072049001800085052001600103056001300119082001400132100004800146245024800194260003900442300004100481502012900522504002900651546003400680900002600714KDM20130360520200916100533ta130529s2013    ulkad    m AL 000   eng  0 aengbkor0 lWM736089fWDP02a629.8b13-3  a559.92501a629.82211 a인용석,g印庸奭,d1980-0KAC20185991010aDesign and analysis of redundant parallel micro manipulator for maskless lithography system =x마스크리스 노광 시스템을 위한 여유자유도를 가지는 병렬 마이크로 매니퓰레이터의 설계 및 분석 /dYong Seok Ihn  aSeoul :bSungkyunkwan Univ.,c2013  axiv, 215 p. :bill., charts ;c30 cm1 aThesis(Ph.D.) --bGraduate School, Sungkyunkwan Univ.,cMajored in Applied Mechanics, Dept. of Mechanical Engineering,d2013  aBibliography: p. 177-195  aIn English; summary in Korean10aIhn, Yongseok,d1980-