00838na  a2200181   4500001001300000005001500013008004100028040001100069041001300080052003600093245016000129300002300289545005700312653008200369700005300451773013700504900001500641KSI00018319920040521200442040430s2002    ulk           000   kor    a0110010 akorbeng01a581.805b한636ㅎc35(1)-35(6)00a격자 조정을 통한 PZT커패시터의 고속동작 성능=xHigh speed performance of Pb(Zr,Ti)O₃ capacitors through lattice engineering/d양비룡  ap. 127-130;c26 cm  a양비룡, 하이닉스반도체, 메모리연구소  a격자조정a PZT커패시터aPerformanceaPb(Zr,Ti)OaLatticeaEngineering1 a양비룡,g梁飛龍,d1961-0KAC2017020784aut0 t한국표면공학회지.d한국표면공학회.g35권 3호(2002년 6월), p. 127-130q 35:3<127w(011001)KSE199509175,x1225-802410aYang, B.L.