00685nam a2200181 c 4500001001300000005001500013008004100028040001100069052003400080245006100114300002300175545005400198653004100252700005300293773012200346856002000468900001500488KSI00003535420040203103703031030s1999    tgk           000   kor    a01100101a569.805b한536ㅅc8(4)-8(6)00aMEMS의 기술동향=xMEMS technical trands/d김용권  ap. 354-358;c26 cm  a김용권, 서울대학교 전기공학부 교수  aMEMSa기술동향aTechnical trands1 a김용권,g金容權,d1960-0KAC2014147534aut0 t센서학회지.d한국센서학회.g8권 5호(1999년 7월), p. 354-358q8:5<354w(011001)KSE199508532,x1225-547540u3316423aKd00010aKim, Y. K.