01460nam a2200289 c 4500001001300000005001500013008004100028040001100069041001300080052003700093245024300130300003200373545005000405545006800455545006800523545005000591653017000641700001900811700004800830700004800878700003600926773013100962900001901093900002101112900002001133900001701153KSI00016295420040209194253031216s2001    ulka          000   kor    a0110010 akorbeng01a554.9405b한622ㅎc10(1)-10(4)00a증착조건에 따른 극미세 다이아몬드상 카본 박막의 탄성률 변화거동=x(A)variation of elastic modulus of very thin diamond-like carbon films with deposition condition/d정진원,e이광렬,e은광용,e고대홍  ap. 387-395:b삽도;c26 cm  a정진원, 연세대학교 세라믹공학과  a이광렬, 한국과학기술연구원 미래기술연구본부  a은광용, 한국과학기술연구원 박막기술연구센타  a고대홍, 연세대학교 세라믹공학과  a증착조건a극미세a다이아몬드상a카본a박막a탄성률a변화거동aDiamond-likeaVariationaElasticaModulusaCarbonaFilmsaDepositionaCondition1 a정진원4aut1 a이광렬,g李光烈,d1961-0KAC2017100261 a은광용,g殷光勇,d1942-0KAC2020415961 a고대홍,d1961-0KAC2016367220 t韓國眞空學會誌.d韓國眞空學會.g10권 4호(2001년 12월), p. 387-395q10:4<387w(011001)KSE199508370,x1225-882210aChung, Jin-Won10aLee, Kwang-Ryeol10aEun, Kwang Yong10aKo, Dae-Hong