01263nam a2200253 c 4500001001300000005001500013008004100028040001100069041001300080052003000093245028800123300003200411545006200443545006200505545006200567653009200629700004100721700004800762700001400810773012900824900001800953900001900971900001900990KSI00015617720040219194227031215s1996    ulka          000   kor    a0110010 akorbeng01a554.9405b한622ㅎc5(1)00aAnalysis of fast pressure control by the Ziegler-Nichols method for a transport module of a high vacuum cluster tool=x고진공 클러스터 장비의 반송모듈에 적용된 Ziegler-Nichols 방법에 의한 고속 압력제어에 관한 해석/d장원익,e이종현,e백종태  ap. 284-291:b삽도;c26 cm  a장원익, 한국전자통신연구소 반도체연구단  a이종현, 한국전자통신연구소 반도체연구단  a백종태, 한국전자통신연구소 반도체연구단  aZiegler-nichols methodaTransport moduleaHigh vacuuma클러스터장비a반송모듈1 a장원익,d1961-0KAC2017256684aut1 a이종현,g李鐘泫,d1958-0KAC2020K41271 a백종태0 t韓國眞空學會誌.d韓國眞空學會.g5권 4호(1996년 12월), p. 284-291q5:4<284w(011001)KSE199508370,x1225-882210aJang, Won Ick10aLee, Jong Hyun10aBaek, Jong Tae